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DryScrub Nitride Process Application - an Example of a Calculation for the Electrode Life Expectancy

Quick Estimation of Electrode Life Expectancy

Electrochemical Technology Corporation strongly recommends DryScrub users to replace the electrode when about 2000 cm3 solid waste is collected. The following expression can be used to make a quick calculation of how many running processes can last before replacing the electrode.

Where:
C is a constant whose value is listed in the summary table.
Q is the flow rate of hydride gas in sccm, and t is the processing time per run in minute.

The above expression is based upon the assumption that about 10% of input hydride gases is reacted to form the wafer film.


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