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The 2DH Specification

The 2DH System

The 2DH uses newly patented plasma technology which turbo charges the performance. Its compact size with ingenious design is readily adaptable for small space installations.

Specifications*

CHAMBER:

  • Operating Pressure - 5 to 10,000Pa (37 to 75,000 mTorr)
  • Dimensions: 420 mm H x290 mm W x 290 mm D.
  • Mating Flange, Top and Bottom: ISO80 Bolt/Clamp Flanges.
  • Flange to Flange separation: 350 mm
  • Clearance: Top and Bottom 10 mm; Side 5 mm
  • Front Clearance for Service 300 mm H x 310 mm W x 300 mm D
  • Weight: Removable Center Cylinder: 5.2 kg, Top / Bottom plates: 8.8 kg.
  • Chamber Mounting Bolts: M8 (Metric Bolts)
  • Installation Orientation: Any Orientation

ELECTRODE: (New Patent Application)

  • Material 316L Stainless steel (reusable )
  • Weight: Empty Approximate 8 kg
  • Loaded up to 2 to 20 kg additional waste - process dependent.
  • Dimensions 254 mm OD x 300mm H.
  • Electrode Surface Area > 2.7 M2
  • Solid Waste Volume > 2,000 cm3
  • Operating time between cleanings - process dependent, 1 to 12 Months
  • Reusable - In-situ Etch Cleaning or External Cleaning

RF POWER SUPPLY: PS 1500

  • Dimensions, 177 mm H x 292 mm W x 464 mm D.
  • Weight = 13 kg.
  • Line = 208 V, Single Phase, 60/50 Hz, 25 Amps ( P.F. 0.72x).
  • Load Power: 1500 watts

* Subject to change without notification


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