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The 2D Specification

The 2D System

The 2D system is the first production model, and has an accumulation of more than 10 years of performance records with hundreds of installations. It is proven to have exceptional reliability and performance in many LPCVD and PECVD processes. The particle reduction performance and exhaust system protection have helped wafers fabs save millions dollars while protecting the environment for all these years.

Specification*

Chamber:

  • Dimensions = 10" H x 20" W x 21" D.
  • Clearance: Top and Bottom = 3”; Front = 20”; Back = 0.5”; Side =0.5”
  • Could be installed inside the 19” Rack Mount Cabinet
  • Mating Flange, Top and Bottom = ASA 3” ID, 4.75” BC and 6” OD with O-Ring Grove
  • Weight: Door = 22 pounds; Body = 43 pounds.
  • Chamber Mounting Bolts = M8 (Metric)

Electrode:

  • Dimensions = 17" OD x8" H.
  • Electrode Surface Area > 4 M2
  • Solid Waste Volume > 2,000 cm2
  • Life Time Before Recycle= process dependent, 1 to 6 months
  • Material=aluminum or upgraded 316L Stainless Steel, reusable.
  • Weight: Empty = Approximate 42 pounds; Loaded = additional 4 to 60 pounds waste, process dependent.

RF Power Supply:

  • RF Power Supply, Dimensions, 7" H x 19" W x 16" D.
  • weight = 50 pounds. - Line = 208 V, Single Phase, 60/50 Hz, 25 Amps ( P.F. 0.72x).
  • Load Power = 1500 watts.

Operating Pressure:

  • 0.12 to 10 Torr.

* Subject to change without notification


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